Electrochemical Etch-Stop

Wafer Holders with electrical contacts and dedicated potentiostats

Wafer holder series

Wafer holders for single wafers with electrical contacts for etch-stop

Complete set of platinum net and pseudo-reference electrodes for etch-stop

MEMS Potentiostat

Compact potentiostat with special features for electrochemical etch-stop

Multi-channel potentiostat for medium- to large scale manufacturing


Electrochemical Etch-Stop, MEMS Potentiostats: Model SC

A dedicated potentiostat for electrochemical etch-stop proceses.

The MEMS Potentiostat Model SC has been especially designed for the use with electrochemical etch-stop techniques in silicon micromachining. The fabrication of many microelectromechanical systems (MEMS) depends on a reliable and easy to use potential controller for this processing step. The MEMS Potentiostat meets both needs. First, a high degree of integration and use of a powerful microcontroller are proof for the technical standard of this system. Very low noise op-amps, precision voltage references and high accuracy A/D- and D/A-converters guarantee excellent reproducibility of your etch-stop process. All outputs are short circuit protected and shut-down if overloaded. The unit detects common error conditions, as a broken wafer or cable, and alerts the operator providing an error description.

The MEMS Potentiostat comes with a dedicated software for Microsoft Windows XP/7/8 gives the user control over all potentiostat settings. In this case, the computer logs all data, presents them on screen and saves them to disk for later use.


  • Output volta ge from -10 V to 10 V
  • supplementary voltage output for four electrode configuration (voltage range 0 V to 10 V)
  • output current up to 750 mA
  • all outputs with short-circuit protection and thermal shut-down
  • auto-ranging current-to voltage converter
  • alphanumeric status display (current and voltage)
  • computer control via serial port (RS-232 compatible), USB 2.0 and Ethernet
  • dedicated software for Microsoft Windows 7/8
  • compact design
  • error detection (broken wafer, broken cable, current overload)
  • detection algorithm for current peak
  • fully opto-isolated computer-interface allows independent parallel processing in a single etchant bath


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Documentation and

For more information, please download our product info below.

For a complete list of our product information sheets please see our Documentation Download Section.